Trench-Assisted Planar Technology
Trench-Assisted 
Planar Technology
20 Years of SiC Innovation Leadership
Up to 20% lower RDS(ON) at elevated temperature
Enables lower conduction losses and cooler performance.
Up to 15% lower switching losses
Faster & efficient high frequency switching for higher power density.
Unparalleled reliability
In high-voltage/temp/humidity, high dv-dt.
Up to 20% lower RDS(ON) at elevated temperature
Enables lower conduction losses and cooler performance.
Up to 15% lower switching losses
Faster & efficient high frequency switching for higher power density.
Unparalleled reliability
In high-voltage/temp/humidity, high dv-dt.
 
			 
			Traditional Planar
(Simple Structure)
 
			 
			Trench-Assisted Planar
(Simple Structure)
 
			Standard Trench
(Complex Structure)
 
			Trench-gate requires 40% more process steps than Planar-gate
Higher production cost & increased complexity for Trench.
 
			Traditional Planar
(Non-Optimized)
 
			 
			Trench-Assisted Planar
(Optimized)
 
			Novel Source contact on trench-side wall
Enables smaller cell-pitch and increased power density.
 
			Standard Trench
(Highest Voltage Stress)
 
			Traditional Planar
(Medium Voltage Stress)
 
			 
			Trench-Assisted Planar
(Lowest Voltage Stress)
 
			Multi-Step Profile drives smooth electric-field distribution
Increases long term reliability.
 
			Traditional Planar
(High RDS(ON) )
 
			 
			Trench-Assisted Planar
(Low RDS(ON) )
 
			Multi-Step Profile enables better current spreading
Enables lower RDS(ON).
 
			Standard Trench
(High RDS(ON) shift vs temp)
Traditional Planar
(High RDS(ON) shift vs temp)
Trench-Assisted Planar
(Low RDS(ON) shift vs temp)
 
			Standard Trench
(High RDS(ON) shift vs temp)
 
			Traditional Planar
(High RDS(ON) shift vs temp)
 
			 
			Trench-Assisted Planar
(Low RDS(ON) shift vs temp)
 
			Optimized for lower RDS(ON) temp shift
Provides up to 20% lower conduction losses.
